JPS6274330U - - Google Patents
Info
- Publication number
- JPS6274330U JPS6274330U JP16568385U JP16568385U JPS6274330U JP S6274330 U JPS6274330 U JP S6274330U JP 16568385 U JP16568385 U JP 16568385U JP 16568385 U JP16568385 U JP 16568385U JP S6274330 U JPS6274330 U JP S6274330U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- heating means
- view
- epitaxial growth
- growth furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16568385U JPS6274330U (en]) | 1985-10-30 | 1985-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16568385U JPS6274330U (en]) | 1985-10-30 | 1985-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6274330U true JPS6274330U (en]) | 1987-05-13 |
Family
ID=31095939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16568385U Pending JPS6274330U (en]) | 1985-10-30 | 1985-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6274330U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01122994A (ja) * | 1987-11-05 | 1989-05-16 | Komatsu Denshi Kinzoku Kk | 化学気相成長法 |
-
1985
- 1985-10-30 JP JP16568385U patent/JPS6274330U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01122994A (ja) * | 1987-11-05 | 1989-05-16 | Komatsu Denshi Kinzoku Kk | 化学気相成長法 |